Product initiatives

Products that contribute to a sustainable society

The total CO2 emissions from the TEL value chain (including raw material procurement and product manufacture, transport, use, and disposal) was calculated according to the GHG Protocol.1 Emissions arising from product use currently account for 90% of our total CO2 emissions. For this reason, we have made it a key corporate objective to promote environmentally friendly product design, and lower the energy consumption of our products, thereby reducing impact on the environment from product use. In fiscal 2015, we established a goal to reduce energy and pure water consumption by 10% by fiscal 2019, using fiscal 2014 consumption as the baseline. To achieve this goal, we are working to reduce energy use and improve overall throughput. In fiscal 2016, we reached this goal with the Triase+ ™ EX-II™ TiN Plus system. In fiscal 2017, we once again achieved the goal earlier than planned with the Precio™ XL wafer prober, the Certas LEAGA™ gas chemical etch system, and the CLEAN TRACK™ LITHIUS Pro™ Z coater/ developer. In addition, the percentage of sales from energy-saving models2 increased in fiscal 2017 to 93.9% of total product sales.

To further reduce the overall environmental impact of our products, we must examine our primary equipment, peripherals, associated facilities, and management at our customers’ factories. Going forward, it will become increasingly important to improve the operational efficiency of our equipment and encourage overall energy-efficient operations at our customers’ factories. Therefore, we will continue to focus on monitoring and controlling our own energy use. We also plan to demonstrate the importance of energy saving measures through compliance with SEMI S23, the semiconductor industry standard for assessing energy conservation.

To meet our goals, we are promoting environmentally friendly manufacturing, development of new technologies, proactive measures to contain greenhouse gases, and further reductions in the use of energy, water, and chemicals.

1 GHG Protocol: Accounting and reporting standards for greenhouse gases (GHG)
2 Based on in-house standards

Percentage of energy-saving model sales in total sales


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Management of chemical substances in products

In order to manufacture environmentally friendly products, TEL has set up a system for managing hazardous chemicals in products it uses. In addition, we proactively collect information on relevant laws and regulations in Japan and abroad to properly ensure compliance. We had no legal or regulatory violations or penalties during fiscal 2017.

When any substance of very high concern (SVHC) is present in our products at a level of 0.1% or higher, we disclose the information appropriately, based on EU REACH3 regulations. We also provide safety data sheets (SDS) in accordance with GHS4 requirements. To comply more effectively with regulations such as EU REACH and China RoHS,5 in April 2015, we conducted a survey of our Japanese suppliers regarding the chemical substances contained in their products based on JAMP AIS.6 In fiscal 2017, we made capital investments to strengthen our IT systems with the aim of enhancing supply chain management of chemical substances in products we use.

We are also focusing on employee education. We now offer a seminar on Product Compliance with Environmental Laws and Regulations to all employees, including not only managers but also staff members from relevant departments. The seminar consists of an overview of frequently revised environmental laws and regulations, lectures on target chemical substances, and comprehension tests. In fiscal 2017, 97% of our employees took the course.

We will continue to closely monitor and appropriately respond to relevant laws and regulations worldwide, further increasing our efforts to reduce hazardous chemical substances.

3 EU REACH: An EU regulation pertaining to the registration, evaluation, authorization, and restriction of chemicals
4 GHS: Globally Harmonized System of Classification and Labelling of Chemicals
5 China RoHS: Chinese regulation on materials including lead, mercury, cadmium, hexavalent chromium, polybrominated biphenyls (PBBs), and polybrominated diphenyl ethers (PBDEs). Businesses are required to provide customers with relevant information on the use of these materials.
6 JAMP AIS: Article Information Sheet (AIS) promoted by the Joint Article Management Promotionconsortium (JAMP). This sheet is used to communicate basic information on regulated chemical substances contained in products.
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Green procurement

Introducing our green procurement
Tokyo Electron Group is promoting, with the cooperation of our suppliers, the notion of "green procurement", which aims to give prior attention to purchasing parts, products and materials that have been produced in a way that takes the environment into account. For details, please refer to the following "Green Procurement Guideline" and its appended documents.

Guideline for Green Procurement Rev. 4.0
TEL Substance List Rev.3.1
Our View on Management of Chemical Substances in Tokyo Electron Group Products Rev. 4.0
Explanation of How TEL Addresses Issues Regarding Chemical Substances Contained in Products Rev. 3.0

Request for provision of environmental information regarding delivered products
Tokyo Electron Group is conducting research on regulated chemical substances used in all parts and products purchased from our suppliers.

Research on regulated chemical substance
Tokyo Electron Group has started applying AIS1 (MSDSplus 2) issued by JAMP3 for the research on regulated chemical substances. For more details about the research process, please contact us using the Corporate Responsibility inquiry form.
Corporate Responsibility inquiry form

1 AIS : A basic information transmission sheet recommended by JAMP to be used to communicate information about chemical substances contained in products (AIS - Article Information Sheet)
2 MSDSplus : Material Safety Data Sheet plus, a chemical substance information transmission sheet regarding chemical substances and dispensed products
3 JAMP : Joint Article Management Promotion-consortium

Please visit the JAMP website for information about AIS and MSDSplus. JAMP website -
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Logistics initiatives

Environmental considerations in logistics
Because of worldwide environmental concerns such as global climate change and the rising demand to reduce the environmental burden of logistics activities, transportation regulations are becoming more stringent. TEL continues to adjust its logistics operations to meet these demands.

CO2 reduction initiatives
TEL’s CO2 emissions from domestic logistics operations are monitored and calculated within the scope of regulation defined by the Act on the Rational Use of Energy. In our overseas logistics operations, CO2 emissions are monitored and calculated based on the data from our intra-company logistics and product shipments to customers.

TEL has been implementing modal shifts1 to transportation methods that are less environmentally harmful, where applicable. For example, we have adopted ocean shipment for some semiconductor and FPD production equipment and are making efforts to reduce production lead time to compensate for the extra time it takes to ship by ocean rather than by air. We have extended the use of shelved trolleys from the shipment of FPD production equipment to semiconductor production equipment as well, thereby improving the load factor of trucks and reducing both CO2 emissions and cost.

Our CO2 emissions in fiscal 2017 were 97 kilotons, a significant increase from the previous fiscal year. This is because of the increase in product shipments compared to fiscal 2016.

1 Modal shift: A change in the mode of transport; specifically, switching from conventional freight transport by truck or aircraft to a means that has a lower impact on the environment, such as rail or ocean.

Resource-saving initiatives
Because TEL ’s products are precision equipment, they must be shipped with care and in clean conditions, requiring the use wooden crates and cardboard boxes. To conserve some of these resources, TEL uses recyclable cardboard boxes for packaging. After the equipment has been shipped and installed, casters and other specialized transport fixtures are collected and brought back to TEL factories for reuse. These are only a few examples of TEL’s resource-saving efforts.
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Product reuse and recycling

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With the advent of the Internet of Things (IoT), semiconductors are in greater demand and are becoming more diverse than ever. This has driven a corresponding rise in the need for more varied semiconductor production equipment. As a leading manufacturer of semiconductor equipment, TEL is strongly encouraging reuse and recycling of equipment and components by marketing refurbished TEL equipment and offering modification services to customers who already have TEL equipment installed. Our refurbished equipment operations start with procuring used equipment from the market, which takes place either directly or through leasing companies. This equipment is then properly tested and refurbished, before being offered to customers as TEL Certified Used Equipment.

Our equipment modification services boost the productivity of installed equipment by maintaining and improving its quality and availability. Through these approaches, we address our customers’ cost, speed, and performance needs, while also contributing to waste reduction and resource conservation and utilization. These efforts help reduce the use of resources and CO2 emissions associated with procuring and manufacturing equipment and components. They are also effective in reducing the costs of production, logistics, and waste disposal.
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